ImageMaster® PRO 10 Wafer | Industrial MTF Measurement System for Wafer-Level and Miniature Lenses
The ImageMaster® PRO 10 Wafer, developed and manufactured by TRIOPTICS Germany, is specifically designed to meet the imaging performance requirements of next-generation wafer-level lenses during high-volume production.
With ultra-fast throughput and high measurement accuracy, this system enables precise quality control of optical wafers and miniature camera lenses. It is fully compatible with cleanroom environments and traceable to international metrology standards.
Key Features:
* High accuracy: 0.8% on-axis MTF, 1.5% off-axis MTF
* Fast measurement: 1.3 seconds per sample, up to 2700 UPH
* Supports wafer curvature measurement and high-precision flange focal length (FFL) detection
* Compatible with wafers up to 8 inches (200 mm), both round and rectangular
* Integrated tilt correction for accurate curvature compensation
* Advanced mounting platform with dynamic wafer rotation and shift adjustment for easy loading
* Measurement traceability to international standards (e.g., PTB)
* Fully cleanroom-compatible (ISO 5)
Product Models & Technical Specifications:
Model |
ImageMaster®PRO 10 Wafer |
Device Type |
Desktop System |
Optical Configuration |
Infinity-to-finite conjugate |
Maximum Spatial Frequency | 400 lp/mm |
On-Axis MTF Accuracy | 0.8% MTF(up to 350 lp/mm)① |
Off-Axis MTF Accuracy | 1.5% MTF(up to 350 lp/mm)① |
EFL Measurement Accuracy |
5μm/0.3% |
FFL Measurement Accuracy |
4μm |
On-Axis Measurement Time |
1.3s ② |
Full Off-Axis Curve Time |
1.3s ② |
Sample Throughput |
2400 UPH ④ |
Measurement Points |
53(27 field positions per camera)② |
System Dimensions (H × W × D) |
1570mm × 1340mm × 810mm |
Weight |
240kg |
Tray Size |
220mm×220mm |
Sample Mounting Platform |
Three-point mount with certified flatness |
Sample Quality Grading |
Up to 4 levels |
Cleanroom Compatibility FS 209/ISO 14644-1 |
100 / ISO 5 |
Light Source |
Halogen (white LED optional) |
Filters | VIS (NIR optional) – standard observer filters included |
ACM |
Integrated autocollimator mount |
① Based on MTF peak value precision
② Depending on sample geometry and configuration
④ One tray holds up to 148 samples; tray exchange time: 5 seconds
Related Links:
◈ ImageMaster® PRO Industrial MTF Measurement System for High-Volume Production
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